AC-150-2463 Valin Centura Chamber Pneumatic EV Manifold Replacement

The AC-150-2463 Centura Chamber pneumatic EV manifold comes as a complete kit for ease of installation. AC-150-2463 is a 14 Station, 14 Valve Manifold, and replaces Centura pneumatic EV manifold part 0190-20124. The kit includes a pneumatic EV manifold with SVD LOTO On/Off control valve, mounting plate, PCB, and cable. As a complete drop-in solution, AC-150-2463 is pneumatically, electrically, and physically compatible with the Centura chamber assembly. AC-150-2463 improves reliability and the larger valve Cv results in faster response times.

Valin has engineered a drop-in pneumatic EV manifold replacement that is a perfect solution for your obsolete Centura Chamber Pneumatic EV Manifolds on your aging fleet of Centura process tools. The AC-150-2463 pneumatic EV manifold comes as a complete kit for ease of installation.

Chamber Configurations Available:

• Centura Poly Etch DPS - Decoupled Plasma Source (DPS)
• Centura 5200 WXZ WCVD
• Centura WxP Tungsten Etch

Case Studies & Articles

• Semifab Reduces Wafer Scrap with Pneumatic Manifold Kits
• Semifab Eliminates Air Leaks with Easy to Install Manifold Kits
• Improving Yield through Upgraded Pneumatic Manifolds
• Valin Customers See Success with Pneumatic Manifold Kits
• Wafer Yield in the Semiconductor Industry

Click here to request POE (Product on Evaluation) order.