Parker Hannifin SMSQ2MICRO Series UHP Surface Mount Regulator

1-1/8" & 1-1/2", Stainless Steel

The SMSQ2Micro and SMSQ2Micro130E modular surface mount regulators are part of the process proven SQ product line. The SMSQ2Micro provides excellent repeatability, stability, sensitivity and has extraordinary response to step function changes.

Product Features

  • Meets SEMI Modular Interface specifications
  • Ease of component retrofit
  • Standard Hastelloy C-22® Poppet and Diaphragm
  • Small footprint allows for same spacing as Veriflo Quantum valves
  • Standard full internal electropolish
  • No springs or threads are exposed to the wetted area
  • Extremely low particle counts
  • Both a 0.06 and 0.15 Cv are available
SMSQ2MICRO Series

7 items

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  • Parker Veriflo SMSQ2MICRO Series SMSQ2MICRO130E60102
    SMSQ2MICRO130E60102 Parker Veriflo SMSQ2MICRO Series 2 Port Surface Mount Regulator
    SMSQ2MICRO130E60102

    Parker Hannifin

    Product Type: High Pressure Regulators

    Parker Veriflo SMSQ2MICRO Series 2 Port Surface Mount Regulator, 316L SS VAR, PCTFE seat, adj 0-60 psig, 0.15 Cv, 1-1/8 C-Seals, 375 psig proof.
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  • Parker Veriflo SMSQ2MICRO Series SMSQ2MICRO130E60602
    SMSQ2MICRO130E60602 Parker Veriflo SMSQ2MICRO Series 2 Port Surface Mount Regulator
    SMSQ2MICRO130E60602

    Parker Hannifin

    Product Type: High Pressure Regulators

    Parker Veriflo SMSQ2MICRO Series 2 Port Surface Mount Regulator, 316L SS VAR, PCTFE seat, adj 0-60 psig, 0.15 Cv, 1-1/8 W-Seals, 375 psig proof.
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  • parker hannifin veriflo pressure regulator
    SMSQ2MICRO60102 Parker Veriflo SMSQ2Micro Pressure Regulator
    SMSQ2MICRO60102

    Parker Hannifin

    Product Type: High Pressure Regulators

    SMSQ2MICRO60102 Parker Veriflo, SMSQ2Micro Pressure Regulator, VeriCleanâ„¢, 1-1/8" Base, 60 PSIG, Electropolished, 316L Stainless Steel, PCTFE Seat, Knob, Ultra-High Purity, Surface Mount, Tied-Diaphragm, C-Seal, 2-Port, Pressure Regulator.
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  • parker hannifin veriflo pressure regulator
    SMSQ2MICRO60602 Parker Veriflo SMSQ2Micro Pressure Regulator
    SMSQ2MICRO60602

    Parker Hannifin

    Product Type: High Pressure Regulators

    SMSQ2MICRO60602 Parker Veriflo, SMSQ2Micro Pressure Regulator, VeriCleanâ„¢, 1-1/8" Base, 60 PSIG, Electropolished, 316L Stainless Steel, PCTFE Seat, Knob, Ultra-High Purity, Surface Mount, Tied-Diaphragm, W-Seal, Pressure Regulator.
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  • parker hannifin veriflo pressure regulator
    SMSQ2MICRO30602 Parker Veriflo SMSQ2Micro Pressure Regulator
    SMSQ2MICRO30602

    Parker Hannifin

    Product Type: High Pressure Regulators

    SMSQ2MICRO30602 Parker Veriflo, SMSQ2Micro Pressure Regulator, VeriCleanâ„¢, 1-1/8" Base, 30 PSIG, Electropolished, 316L Stainless Steel, PCTFE Seat, Knob, Ultra-High Purity, Surface Mount, Tied-Diaphragm, W-Seal, Pressure Regulator.
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  • parker hannifin veriflo pressure regulator
    SMSQ2MICRO130E30102 Parker Veriflo Pressure Regulator
    SMSQ2MICRO130E30102

    Parker Hannifin

    Product Type: High Pressure Regulators

    SMSQ2MICRO130E30102 Parker Veriflo, SMSQ2Micro Pressure Regulator, VeriCleanâ„¢, 1-1/8" Base, 30 PSIG, Electropolished, 316L Stainless Steel, PCTFE Seat, Knob, Ultra-High Purity, Surface Mount, Tied-Diaphragm, C-Seal, 2-Port, Pressure Regulator.
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  • Parker Veriflo SM SQ2Micro
    SMSQ2MICRO30102 Parker Veriflo SMSQ2Micro Pressure Regulator
    SMSQ2MICRO30102

    Parker Hannifin

    Product Type: High Pressure Regulators

    Parker Veriflo SQ2Micro Surface Mount Regulator, 1/4", C Seal Connection, 316L SST.
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