Parker Hannifin SM930 Series Ultra-High Purity (UHP) Surface Mount Diaphragm Valve

The SM930 Series surface mount valve provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor tool applications requiring flow capacities up to 0.30 Cv and operating pressures up to 300 psig.

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  • SM930KS102 Parker Veriflo SM930 Series Ultra-High Purity Surface Mount Diaphragm Valve
    SM930KS102

    Parker Hannifin

    Parker Veriflo SM930 Series Ultra-High Purity Surface Mount Diaphragm Valve, P/N 54021076 Replaces P/N SM930MS102HK.
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