Parker Veriflo 955 Series High Purity Diaphragm Valves

The 955 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.55 Cv and operating pressures up to 250 psig.

The Parker 955 Series diaphragm valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

The 955 Series design has no internally wetted threads or springs which minimizes particle generation and particle entrapment for reduced process contamination. The valve's exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life in taxing applications. The 955 Series wetted components are fabricated from specialty materials to provide exceptional corrosion resistance and leak integrity. The internally electropolished body is manufactured from Parker's proprietary UHP grade 316L stainless steel, Vericlean™. The diaphragm is a high strength Cobalt based alloy to maximize product life and the PCTFE, PEEK®, or Vespel® seat provides excellent chemical compatibility along with a robust shut-off performance.

All 955 Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat, and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Features/Benefits:

  • 5 micro inch (Ra) electropolish surface finish
  • High cycle life (including corrosive service)
  • Internally springless and thread less design minimizes particle generation and gas entrapment
  • Fully functional from vacuum to 250 psig
  • Internal leak rate:  4 x 10-9 scc/sec He
  • External leak rate:  2 x 10-10 scc/sec He
  • Cv of .55
955 Series

22 items

  • Product
  • Qty in Cart
  • Quantity
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  • Parker Veriflo 955GSFSMMLK2.3
    955GSFSMMLK2.3

    Parker Hannifin

    Product Type: Diaphragm Valves

    End 1 Type: Face Seal Male

    End 2 Type: Face Seal Male

    Parker Veriflo 955 High Purity High Flow Diaphragm Valve, two port, toggle handle, 316L SS body, 1/4" face seal male (fixed) x 1/4" face seal male (fixed), 2.3" face-to-face, PCTFE seat, 0.55 Cv
    Qty in Cart: 0
    Price:
    Subtotal:
  • Parker Veriflo 955 Series 955AOPLPNCSI67
    955AOPLPNCSI67

    Parker Hannifin

    Product Type: Diaphragm Valves

    End 1 Type: Male Face Seal

    End 2 Type: Tube Stub out

    Parker Veriflo 955 Series Air Operated Low Pressure Diaphragm Valve, 316L SS, PCTFE seat, 1/2 male face seal in- 1/2 tube stub out, 0.055 Cv, 75 psig act press, vac-250 psig max, 375 psig proof.
    Qty in Cart: 0
    Price:
    Subtotal:
  • parker hannifin veriflo diaphragm valve
    955MSFSMF

    Parker Hannifin

    Product Type: Diaphragm Valves

    955MSFSMF Parker Veriflo, 955 Diaphragm Valve, VeriCleanâ„¢, 1/4" x 1/4", Male Face Seal x Female Face Seal, 250 PSIG, Ra Electropolished, 316L Stainless Steel, Anodized Aluminum Mini Lever, 2-Port, High Flow, Diaphragm Valve.
    Qty in Cart: 0
    Price:
    Subtotal:
  • Parker Veriflo 945LSFSFM
    945LSFSFM

    Parker Hannifin

    Product Type: Diaphragm Valves

    End 1 Type: Face Seal Female

    End 2 Type: Face Seal Male

    Parker Veriflo 945 High Purity, Low Internal Volume Diaphragm Valve, two port, 1/4 turn lever, 316L SS body, 1/4" face seal female (swivel) x 1/4" face seal male (swivel), PCTFE seat, 0.18 Cv
    Qty in Cart: 0
    Price:
    Subtotal:
  • Parker Veriflo 945AOPLPNCSFSMM
    945AOPLPNCSFSMM

    Parker Hannifin

    Product Type: Diaphragm Valves

    End 1 Type: Face Seal Male

    End 2 Type: Face Seal Male

    Parker Veriflo 945 High Purity, Low Internal Volume Diaphragm Valve, two port, air operated, NC, 316L SS body, 1/4" face seal male (swivel) x 1/4" face seal male (swivel), PCTFE seat, 0.25 Cv
    Qty in Cart: 0
    Price:
    Subtotal:
  • Parker Veriflo 945AOPLPNCSFSMF
    945AOPLPNCSFSMF

    Parker Hannifin

    Product Type: Diaphragm Valves

    End 1 Type: Face Seal Male

    End 2 Type: Face Seal Female

    Parker Veriflo 945 High Purity, Low Internal Volume Diaphragm Valve, two port, air operated, NC, 316L SS body, 1/4" face seal male (swivel) x 1/4" face seal female (swivel), PCTFE seat, 0.25 Cv
    Qty in Cart: 0
    Price:
    Subtotal:
  • Parker Veriflo 945AOPHPNCSFSMM
    945AOPHPNCSFSMM

    Parker Hannifin

    Product Type: Diaphragm Valves

    End 1 Type: Face Seal Male

    End 2 Type: Face Seal Male

    Parker Veriflo 945 High Purity, Low Internal Volume Diaphragm Valve, two port, air operated, NC, 316L SS body, 1/4" face seal male (swivel) x 1/4" face seal male (swivel), PCTFE seat, 0.25 Cv
    Qty in Cart: 0
    Price:
    Subtotal:
  • Parker Veriflo 955SSTS8
    955SSTS8

    Parker Hannifin

    Product Type: Diaphragm Valves

    End 1 Type: Tube Stub

    End 2 Type: Tube Stub

    Parker Veriflo 955 High Purity High Flow Diaphragm Valve, two port, handwheel, 316L SS body, 1/2" tube stub x 1/2" tube stub, PCTFE seat, 0.55 Cv
    Qty in Cart: 0
    Price:
    Subtotal:
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