Parker Hannifin SMSQ2MICRO Series UHP Surface Mount Regulator

1-1/8" & 1-1/2", Stainless Steel

The SMSQ2Micro and SMSQ2Micro130E modular surface mount regulators are part of the process proven SQ product line. The SMSQ2Micro provides excellent repeatability, stability, sensitivity and has extraordinary response to step function changes.

Product Features

• Meets SEMI Modular Interface specifications
• Ease of component retrofit
• Standard Hastelloy C-22® Poppet and Diaphragm
• Small footprint allows for same spacing as Veriflo Quantum valves
• Standard full internal electropolish
• No springs or threads are exposed to the wetted area
• Extremely low particle counts
• Both a 0.06 and 0.15 Cv are available

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