Mott Corporation GSE Series Purity GasShield® Diffusers

Stainless Steel Filter Media

Mott GasShield Diffusers quickly vent vacuum chambers to atmosphere which decreases cycle time and increases throughput. Mott stainless steel diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.003 µm from incoming gas minimizing defects on the wafer. Stainless steel diffusers can withstand higher operating pressures and maintain product integrity for over 3 million cycles - the longest lifetime in the industry.

Applications

Mott diffusers are used in vent applications on load lock chambers, transfer chambers, cooling chambers, and process chambers of Semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers.

GSE Series

6 items

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  • Mott Corporation Duffusers GSE-T1-10S
    GSE-T1-10S

    Mott Corporation

    Product Type: Diffusers

    Mott Porous Metal Filter/Diffusers GSE Series (GasShield® Filter/Diffusers) 6894005
    Qty in Cart: 0
    Price:
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  • Mott Corporation Duffusers GSE-T1-20N
    GSE-T1-20N

    Mott Corporation

    Product Type: Diffusers

    Mott Porous Metal Filter/Diffusers GSE Series (GasShield® Filter/Diffusers) 6894006
    Qty in Cart: 0
    Price:
    Subtotal:
  • Mott Corporation Duffusers GSE-T1-40N
    GSE-T1-40N

    Mott Corporation

    Product Type: Diffusers

    Mott Porous Metal Filter/Diffusers GSE Series (GasShield® Filter/Diffusers) 6894007
    Qty in Cart: 0
    Price:
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  • Mott Corporation Duffusers GSE-V1-20N
    GSE-V1-20N

    Mott Corporation

    Product Type: Diffusers

    Mott Porous Metal Filter/Diffusers GSE Series (GasShield® Filter/Diffusers) 6894003
    Qty in Cart: 0
    Price:
    Subtotal:
  • Mott Corporation Duffusers GSE-V1-10S
    GSE-V1-10S

    Mott Corporation

    Product Type: Diffusers

    Mott Porous Metal Filter/Diffusers GSE Series (GasShield® Filter/Diffusers) 6894002
    Qty in Cart: 0
    Price:
    Subtotal:
  • Mott Corporation Duffusers GSE-V1-40N
    GSE-V1-40N

    Mott Corporation

    Product Type: Diffusers

    Mott Porous Metal Filter/Diffusers GSE Series (GasShield® Filter/Diffusers) 6894004
    Qty in Cart: 0
    Price:
    Subtotal:
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