Mott GasShield Diffusers quickly vent vacuum chambers to atmosphere which decreases cycle time and increases throughput. Mott stainless steel diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.003 µm from incoming gas minimizing defects on the wafer. Stainless steel diffusers can withstand higher operating pressures and maintain product integrity for over 3 million cycles - the longest lifetime in the industry.Applications
Mott diffusers are used in vent applications on load lock chambers, transfer chambers, cooling chambers, and process chambers of Semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers.